1.案例背景À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
某功能模块在用户端出现功能失效,经返厂检修,发现该模块上的一片IC输出异常,经更换IC后,功能模块恢复正常。À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
2.分析方法简述À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
对样品进行外观观察,未发现明显异常。À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJÀ°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ 经X-RAY无损检测,未发现明显异常。À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
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À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
通过C-SAM扫描发现了IC内部存在分层现象。À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
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À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
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图5.NG样品C-SAM图片À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
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通过IV曲线测试,发现引脚间存在漏电通道。À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
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À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
图6.NG样品IV曲线图À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
DE-CAP后,利用SEM/EDS进行分析,确认了引脚间存在银迁移问题。À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
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À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
表1.开封后的NG样品内部EDS测试结果(Wt%)À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
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À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
3.结论À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
IC内部存在分层,由于水汽的入侵,加上集成电路各引脚之间存在电位差,导致了引脚间的银迁移,从而在引脚间形成微导通电路,致IC输出异常。À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
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4.参考标准À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
GJB 548B-2005 微电子器件失效分析程序-方法5003。À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
IPC-TM-650 2.1.1-2004手动微切片法。À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
GB/T 17359-2012 电子探针和扫描电镜X射线能谱定量分析通则。À°ÇÍf3/©bbs.3c3t.comñÊ"3+ç#ÇJ
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