1.案例背景¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë
某功能模块在用户端出现功能失效,经返厂检修,发现该模块上的一片IC输出异常,经更换IC后,功能模块恢复正常。¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë
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2.分析方法简述¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë
对样品进行外观观察,未发现明显异常。¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë
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¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë 经X-RAY无损检测,未发现明显异常。¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë
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通过C-SAM扫描发现了IC内部存在分层现象。¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë
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图5.NG样品C-SAM图片¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë
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通过IV曲线测试,发现引脚间存在漏电通道。¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë
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图6.NG样品IV曲线图¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë
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DE-CAP后,利用SEM/EDS进行分析,确认了引脚间存在银迁移问题。¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë
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表1.开封后的NG样品内部EDS测试结果(Wt%)¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë
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3.结论¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë
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IC内部存在分层,由于水汽的入侵,加上集成电路各引脚之间存在电位差,导致了引脚间的银迁移,从而在引脚间形成微导通电路,致IC输出异常。¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë
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4.参考标准¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë
GJB 548B-2005 微电子器件失效分析程序-方法5003。¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë
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IPC-TM-650 2.1.1-2004手动微切片法。¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë
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GB/T 17359-2012 电子探针和扫描电镜X射线能谱定量分析通则。¦LPIf;!õbbs.3c3t.comïÆyp/9®{2ë
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