仪器名称9¯Jâ¨
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| 信号检测9¯Jâ¨
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| 元素测定9¯Jâ¨
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| 检测限9¯Jâ¨
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| 深度分辨率9¯Jâ¨
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| 适用范围9¯Jâ¨
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扫描电子显微镜（SEM）9¯Jâ¨
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| 二次及背向散射电子&X射线9¯Jâ¨
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| B-U (EDS mode)9¯Jâ¨
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| 0.1 - 1 at%9¯Jâ¨
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| 0.5 - 3 µm (EDS)9¯Jâ¨
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| 高辨析率成像9¯Jâ¨
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元素微观分析及颗粒特征化描述9¯Jâ¨
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X射线能谱仪（EDS）9¯Jâ¨
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| 二次背向散射电子&X射线9¯Jâ¨
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| B-U9¯Jâ¨
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| 0.1 – 1 at%9¯Jâ¨
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| 0.5 – 3 μm9¯Jâ¨
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| 小面积上的成像与元素组成；缺陷处元素的识别/绘图；颗粒分析（>300nm）9¯Jâ¨
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显微红外显微镜（FTIR）9¯Jâ¨
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| 红外线吸收9¯Jâ¨
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| 分子群9¯Jâ¨
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| 0.1 - 1 wt%9¯Jâ¨
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| 0.1 - 2.5 µm9¯Jâ¨
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| 污染物分析中识别有机化合物的分子结构9¯Jâ¨
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识别有机颗粒、粉末、薄膜及液体（材料识别）9¯Jâ¨
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量化硅中氧和氢以及氮化硅晶圆中的氢 （Si-H vs. N-H）9¯Jâ¨
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污染物分析（析取、除过气的产品，残余物）9¯Jâ¨
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拉曼光谱（Raman）9¯Jâ¨
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| 拉曼散射9¯Jâ¨
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| 化学及分子键联资料9¯Jâ¨
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| >=1 wt%9¯Jâ¨
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| 共焦模式9¯Jâ¨
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1到5 µm9¯Jâ¨
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| 为污染物分析、材料分类以及张力力测量而识别有机和无机化合物的分子结构9¯Jâ¨
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拉曼，碳层特征 （石墨、金刚石 ）9¯Jâ¨
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非共价键联压焊(复合体、金属键联)9¯Jâ¨
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定位(随机v. 有组织的结构)9¯Jâ¨
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俄歇电子能谱仪（AES）9¯Jâ¨
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| 来自表面附近的Auger电子9¯Jâ¨
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| Li-U9¯Jâ¨
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| 0.1-1%亚单层9¯Jâ¨
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| 20 – 200 Ǻ侧面分布模式9¯Jâ¨
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| 缺陷分析；颗粒分析；表面分析；小面积深度剖面；薄膜成分分析9¯Jâ¨
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|
X射线光电子能谱仪（XPS）9¯Jâ¨
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| 来自表面原子附近的光电子9¯Jâ¨
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| Li-U化学键联信息9¯Jâ¨
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| 0.01 - 1 at% sub-monolayer9¯Jâ¨
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| 20 - 200 Å（剖析模式）9¯Jâ¨
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10 - 100 Å (表面分析）9¯Jâ¨
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| 有机材料、无机材料、污点、残留物的表面分析9¯Jâ¨
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测量表面成分及化学状态信息9¯Jâ¨
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薄膜成份的深度剖面9¯Jâ¨
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硅 氧氮化物厚度和测量剂量9¯Jâ¨
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薄膜氧化物厚度测量（SiO2, Al2O3 等.）9¯Jâ¨
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飞行时间二次离子质谱仪（TOF-SIMS）9¯Jâ¨
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| 分子和元素种类9¯Jâ¨
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| 整个周期表，加分子种类9¯Jâ¨
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| 107 - 1010at/cm2 sub-monolayer9¯Jâ¨
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| 1 - 3 monolayers (Static mode)9¯Jâ¨
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| 有机材料和无机材料的表面微量分析9¯Jâ¨
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来自表面的大量光谱9¯Jâ¨
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表面离子成像9¯Jâ¨
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|
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塑料断口红色颗粒物分析9¯Jâ¨
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| 塑料表面白色粉末成分分析9¯Jâ¨
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连接端子pin针表面异物分析9¯Jâ¨
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| 金手指端部表面异物分析9¯Jâ¨
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镀金管脚表面异物分析9¯Jâ¨
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PCB表面异物成分分析9¯Jâ¨
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