仪器名称G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 信号检测G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 元素测定G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 检测限G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 深度分辨率G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 适用范围G{\'[äO_«bbs.3c3t.comS(P ;û Ä
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扫描电子显微镜（SEM）G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 二次及背向散射电子&X射线G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| B-U (EDS mode)G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 0.1 - 1 at%G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 0.5 - 3 µm (EDS)G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 高辨析率成像G{\'[äO_«bbs.3c3t.comS(P ;û Ä
元素微观分析及颗粒特征化描述G{\'[äO_«bbs.3c3t.comS(P ;û Ä
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X射线能谱仪（EDS）G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 二次背向散射电子&X射线G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| B-UG{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 0.1 – 1 at%G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 0.5 – 3 μmG{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 小面积上的成像与元素组成；缺陷处元素的识别/绘图；颗粒分析（>300nm）G{\'[äO_«bbs.3c3t.comS(P ;û Ä
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显微红外显微镜（FTIR）G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 红外线吸收G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 分子群G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 0.1 - 1 wt%G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 0.1 - 2.5 µmG{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 污染物分析中识别有机化合物的分子结构G{\'[äO_«bbs.3c3t.comS(P ;û Ä
识别有机颗粒、粉末、薄膜及液体（材料识别）G{\'[äO_«bbs.3c3t.comS(P ;û Ä
量化硅中氧和氢以及氮化硅晶圆中的氢 （Si-H vs. N-H）G{\'[äO_«bbs.3c3t.comS(P ;û Ä
污染物分析（析取、除过气的产品，残余物）G{\'[äO_«bbs.3c3t.comS(P ;û Ä
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拉曼光谱（Raman）G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 拉曼散射G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 化学及分子键联资料G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| >=1 wt%G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 共焦模式G{\'[äO_«bbs.3c3t.comS(P ;û Ä
1到5 µmG{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 为污染物分析、材料分类以及张力力测量而识别有机和无机化合物的分子结构G{\'[äO_«bbs.3c3t.comS(P ;û Ä
拉曼，碳层特征 （石墨、金刚石 ）G{\'[äO_«bbs.3c3t.comS(P ;û Ä
非共价键联压焊(复合体、金属键联)G{\'[äO_«bbs.3c3t.comS(P ;û Ä
定位(随机v. 有组织的结构)G{\'[äO_«bbs.3c3t.comS(P ;û Ä
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俄歇电子能谱仪（AES）G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 来自表面附近的Auger电子G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| Li-UG{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 0.1-1%亚单层G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 20 – 200 Ǻ侧面分布模式G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 缺陷分析；颗粒分析；表面分析；小面积深度剖面；薄膜成分分析G{\'[äO_«bbs.3c3t.comS(P ;û Ä
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X射线光电子能谱仪（XPS）G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 来自表面原子附近的光电子G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| Li-U化学键联信息G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 0.01 - 1 at% sub-monolayerG{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 20 - 200 Å（剖析模式）G{\'[äO_«bbs.3c3t.comS(P ;û Ä
10 - 100 Å (表面分析）G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 有机材料、无机材料、污点、残留物的表面分析G{\'[äO_«bbs.3c3t.comS(P ;û Ä
测量表面成分及化学状态信息G{\'[äO_«bbs.3c3t.comS(P ;û Ä
薄膜成份的深度剖面G{\'[äO_«bbs.3c3t.comS(P ;û Ä
硅 氧氮化物厚度和测量剂量G{\'[äO_«bbs.3c3t.comS(P ;û Ä
薄膜氧化物厚度测量（SiO2, Al2O3 等.）G{\'[äO_«bbs.3c3t.comS(P ;û Ä
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飞行时间二次离子质谱仪（TOF-SIMS）G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 分子和元素种类G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 整个周期表，加分子种类G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 107 - 1010at/cm2 sub-monolayerG{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 1 - 3 monolayers (Static mode)G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 有机材料和无机材料的表面微量分析G{\'[äO_«bbs.3c3t.comS(P ;û Ä
来自表面的大量光谱G{\'[äO_«bbs.3c3t.comS(P ;û Ä
表面离子成像G{\'[äO_«bbs.3c3t.comS(P ;û Ä
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|  G{\'[äO_«bbs.3c3t.comS(P ;û Ä
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塑料断口红色颗粒物分析G{\'[äO_«bbs.3c3t.comS(P ;û Ä G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 塑料表面白色粉末成分分析G{\'[äO_«bbs.3c3t.comS(P ;û Ä G{\'[äO_«bbs.3c3t.comS(P ;û Ä
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|  G{\'[äO_«bbs.3c3t.comS(P ;û Ä
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连接端子pin针表面异物分析G{\'[äO_«bbs.3c3t.comS(P ;û Ä G{\'[äO_«bbs.3c3t.comS(P ;û Ä
| 金手指端部表面异物分析G{\'[äO_«bbs.3c3t.comS(P ;û Ä G{\'[äO_«bbs.3c3t.comS(P ;û Ä
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|  G{\'[äO_«bbs.3c3t.comS(P ;û Ä
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镀金管脚表面异物分析G{\'[äO_«bbs.3c3t.comS(P ;û Ä G{\'[äO_«bbs.3c3t.comS(P ;û Ä
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|  G{\'[äO_«bbs.3c3t.comS(P ;û Ä
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PCB表面异物成分分析G{\'[äO_«bbs.3c3t.comS(P ;û Ä G{\'[äO_«bbs.3c3t.comS(P ;û Ä
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